Semiconductor Industry
In the semiconductor industry, in order to avoid potential risks, the requirements for cleanliness and purity of seals are very strict. At the same time, seals must be able to work for a long time under the pressure of high vacuum and aggressive chemical gases and high temperature environment. We have two production plants in China, with a clean room of 500 square meters, to prevent the pollution of seals in the production process. Taberz® perfluoroether rubber (FFKM) semiconductor series has high purity,cleanliness and can withstand the erosion of various chemicals and plasma, which has been successfully applied in world-famous semiconductor factories
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